Semiconductor Manufacturing Handbook
- 22h 13m
- Hwaiyu Geng
- McGraw-Hill
- 2005
This handbook will provide engineers with the principles, applications, and solutions needed to design and manage semiconductor manufacturing operations. Consolidating the many complex fields of semiconductor fundamentals and manufacturing into one volume by deploying a team of world class specialists, it allows the quick look up of specific manufacturing reference data across many subdisciplines.
About the Author
Hwaiyu Geng, CMFGE, PE, (Palo Alto, California) is a corporate project manager at Hewlett-Packard Company. His experience in manufacturing engineering is diverse, including work at Applied Materials and HP high-tech industries. He has faced many of the challenges facing engineers today, having designed manufacturing processes and facilities for new products, planned and implemented automated manufacturing systems in high-tech industries, and established quality, safety, and maintenance programs. He is a certified manufacturing engineer by the Society of Manufacturing Engineers and a professional engineer in the State of California. Mr. Geng, a patent holder, is also the author of McGraw-Hill’s Manufacturing Engineering Handbook.
In this Book
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HOW SEMICONDUCTOR CHIPS ARE MADE
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IC DESIGN
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SILICON SUBSTRATES FOR SEMICONDUCTOR MANUFACTURING
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COPPER, LOW-κ DIELECTRICS, AND THEIR RELIABILITY
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FUNDAMENTALS OF SILICIDE FORMATION ON Si
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PLASMA PROCESS CONTROL
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VACUUM TECHNOLOGY
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PHOTOMASK
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MICROLITHOGRAPHY
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ION IMPLANTATION AND RAPID THERMAL PROCESSING
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WET ETCHING
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PLASMA ETCHING
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PHYSICAL VAPOR DEPOSITION
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CHEMICAL VAPOR DEPOSITION
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EPITAXY
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ECD FUNDAMENTALS
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CHEMICAL MECHANICAL POLISHING
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WET CLEANING
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INSPECTION, MEASUREMENT, AND TEST
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GRINDING, STRESS RELIEF, AND DICING
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PACKAGING
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NANOTECHNOLOGY AND NANOMANUFACTURING
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FUNDAMENTALS OF MICROELECTROMECHANICAL SYSTEMS
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FLAT-PANEL DISPLAY TECHNOLOGY AND MANUFACTURING
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SPECIALTY GAS AND CDA SYSTEMS
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WASTE GAS ABATEMENT SYSTEMS
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PFC ABATEMENT
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CHEMICAL AND SLURRY HANDLING SYSTEMS
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FLUID HANDLING COMPONENTS FOR HIGH-PURITY LIQUID CHEMICALS AND SLURRIES
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FUNDAMENTALS OF ULTRAPURE WATER
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YIELD MANAGEMENT
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AUTOMATED MATERIAL HANDLING SYSTEM
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CD METROLOGY AND CD-SEM
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SIX SIGMA
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ADVANCED PROCESS CONTROL
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ENVIRONMENTAL, HEALTH, AND SAFETY CONSIDERATIONS IN SEMICONDUCTOR FABRICATION FACILITIES
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PLAN, DESIGN, AND CONSTRUCTION OF A FAB
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CLEANROOM DESIGN AND CONSTRUCTION
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MICRO-VIBRATION AND NOISE DESIGN
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ESD CONTROLS IN CLEANROOM ENVIRONMENTS
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AIRBORNE MOLECULAR CONTAMINATION
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PARTICLE MONITORING IN SEMICONDUCTOR MANUFACTURING
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WASTEWATER NEUTRALIZATION SYSTEMS
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