MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering, Second Edition
- 10h 25m
- Tai-Ran Hsu
- John Wiley & Sons (US)
- 2008
An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering.
Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances.
Other highlights of the Second Edition include:
- Expanded coverage of microfabrication plus assembly and packaging technologies
- The introduction of microgyroscopes, miniature microphones, and heat pipes
- Design methodologies for thermally actuated multilayered device components
- The use of popular SU-8 polymer material
Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, the Second Edition will be of significant value for both professionals and senior-level mechanical or electrical engineering students.
About the Author
Tai-Ran Hsu, PhD, is a Professor in the Department of Mechanical and Aerospace Engineering, San Jose State University, California. Dr. Hsu is the author of the earlier edition of this book, which is considered one of the bestselling textbooks on the subject of MEMS.
In this Book
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Overview of MEMS and Microsystems
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Working Principles of Microsystems
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Engineering Science for Microsystems Design and Fabrication
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Engineering Mechanics for Microsystems Design
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Thermofluid Engineering and Microsystems Design
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Scaling Laws in Miniaturization
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Materials for Mems and Microsystems
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Microsystems Fabrication Processes
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Overview of Micromanufacturing
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Microsystems Design
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Assembly, Packaging, and Testing of Microsystems
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Introduction to Nanoscale Engineering
